UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                 SCHEDULE 13G/A

                    Under the Securities Exchange Act of 1934

                               (Amendment No. 3)*

                                 Entegris, Inc.
                                (Name of Issuer)

                                  Common Stock
                         (Title of Class of Securities)

                                    29362U104
                                 (CUSIP Number)

*The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).

                                   Page 1 of 5



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CUSIP No. 29362U104                   13G/A                  Page 2 of 5 Pages
          ---------
---------------------                                      ---------------------

--------------------------------------------------------------------------------

 1    NAME OF REPORTING PERSON
      S.S. or I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

      James E. Dauwalter
--------------------------------------------------------------------------------

 2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                     (a) [_]
                     (b) [_]
--------------------------------------------------------------------------------

 3    SEC USE ONLY

--------------------------------------------------------------------------------

 4    CITIZENSHIP OR PLACE OF ORGANIZATION

      U.S.A.
--------------------------------------------------------------------------------

                            5    SOLE VOTING POWER

                                 807,088
                            ----------------------------------------------------
NUMBER OF
SHARES                      6    SHARED VOTING POWER
BENEFICIALLY
OWNED BY                         3,576,741
EACH                        ----------------------------------------------------
REPORTING
PERSON                      7    SOLE DISPOSITIVE POWER
WITH
                                 807,088
                            ----------------------------------------------------

                            8    SHARED DISPOSITIVE POWER

                                 3,576,741
--------------------------------------------------------------------------------

 9    AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

      4,383,829
--------------------------------------------------------------------------------

10    CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES*


--------------------------------------------------------------------------------

11    PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9

      5.9%
--------------------------------------------------------------------------------

12    TYPE OF REPORTING PERSON*

      IN
--------------------------------------------------------------------------------
                      * SEE INSTRUCTION BEFORE FILLING OUT!

                                   Page 2 of 5



Item 1.

      (a)  Name of Issuer:

           Entegris, Inc.

      (b)  Address of Issuer's Principal Executive Office:

           3500 Lyman Boulevard
           Chaska, MN 55318

Item 2.

      (a)  Name of Person Filing:

           James E. Dauwalter

      (b)  Address of Principal Business Office:

           3500 Lyman Boulevard
           Chaska, MN 55318

      (c)  Citizenship:

           U.S.A.

      (d)  Title of Class of Securities:

           Common Stock, $.01 par value

      (e)  CUSIP Number:

           29362U104

Item 3.    Not Applicable.

Item 4.    Ownership

      (a)  Amount beneficially owned:

           4,383,829 shares. The number of shares beneficially owned as of
December 31, 2003 includes 75,958 shares held directly, of which 16,500 were
issued pursuant to a restricted stock grant and are subject to forfeiture if
certain obligations such as continued employment are not met; 373,536 shares
held by family members; 280,161

                                   Page 3 of 5



shares allocated to Mr. Dauwalter's account under the Entegris, Inc. ESOP;
2,923,044 shares held in family trusts, foundations, and other entities; and an
aggregate of 731,130 shares subject to stock options exercisable within 60 days.

      (b)  Percent of Class:

           5.9%

      (c)  Number of Shares as to Which Such Person Has:

           (i)    sole power to vote or direct the vote:

                  807,088

           (ii)   shared power to vote or direct the vote:

                  3,576,741

           (iii)  sole power to dispose or direct the disposition of:

                  807,088

           (iv)   shared power to dispose or to direct the disposition of:

                  3,576,741

Item 5.    Not Applicable.

Item 6.    Not Applicable.

Item 7.    Not Applicable.

Item 8.    Not Applicable.

Item 9.    Not Applicable.

Item 10.   Not Applicable.

                                   Page 4 of 5



                                    SIGNATURE

     After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

Dated: February 8, 2004

                                                By:   /s/ James E. Dauwalter
                                                    --------------------------
                                                         James E. Dauwalter

                                   Page 5 of 5