FORM 4 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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(Print or Type Responses)

1. Name and Address of Reporting Person * CARNS MICHAEL P C   2. Issuer Name and Ticker or Trading Symbol ENTEGRIS INC [ENTG] 5. Relationship of Reporting Person(s) to Issuer (Check all applicable) __X__ Director _____ 10% Owner _____ Officer (give title below) _____ Other (specify below) (Last) (First) (Middle) 966 CORAL DRIVE 3. Date of Earliest Transaction (Month/Day/Year) 05/06/2009 (Street) PEBBLE BEACH, CA 93953-2503 4. If Amendment, Date Original Filed(Month/Day/Year) 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned

1.Title of Security (Instr. 3) 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4) Code V Amount (A) or (D) Price Common Stock 05/06/2009   A   22,196 (1) A $ 11,547 (2) 227,765 D   Common Stock 05/06/2009   A   45,077 (3) A $ 0 272,842 D   Common Stock 05/06/2009   A   3,000 (4) A $ 0 275,842 D

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 3)

2. Conversion or Exercise Price of Derivative Security

3. Transaction Date (Month/Day/Year)

3A. Deemed Execution Date, if any (Month/Day/Year)

4. Transaction Code (Instr. 8)

5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4, and 5)

6. Date Exercisable and Expiration Date (Month/Day/Year)

7. Title and Amount of Underlying Securities (Instr. 3 and 4)

8. Price of Derivative Security (Instr. 5)

9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)

10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4)

11. Nature of Indirect Beneficial Ownership (Instr. 4)

Code

V

(A)

(D)

Date Exercisable

Expiration Date

Title

Amount or Number of Shares

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
CARNS MICHAEL P C 966 CORAL DRIVE PEBBLE BEACH, CA 93953-2503	X

Signatures

/s/ Peter W. Walcott attorney-in-fact for Michael P.C. Carns		05/08/2009
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 4(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	These shares are unrestricted and were awarded in connection with a forfeiture of cash directors fees for the period March 1, 2009 through May 31, 2009.
(2)	The number of shares covered by this award was determined by dividing the cash amount of directors fees forfeited by the closing price of $0.52 on the date that the cash fees would normally be paid, March 2, 2009, and deducting from the result the number of shares granted to the reporting person in connection with the forfeiture of fees referred to in Footnote 1 above on January 14, 2009.
(3)	These shares were awarded, effective May 6, 2009, as restricted stock units pursuant to the Entegris, Inc. 1999 Long Term Incentive and Stock Option Plan which provides for the award of restricted stock units to officers and directors of the Issuer in consideration for services as such.
(4)	These shares were awarded on May 6, 2009, effective October 15, 2009, as restricted stock pursuant to the Entegris, Inc. Outside Directors' Option Plan which provides for the award of restricted stock to outside directors of the Issuer in consideration for services as such.

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